Liquid handling system with electronic information storage

ABSTRACT

An electronic storage device is coupled with a container capable of holding liquid for electronically storing information relating to the liquid stored in the container. The system can be configured with an antenna, for storing information to and reading information from the electronic storage device. A microprocessor-based controller, coupled with the antenna, may be employed for controlling processing of the liquid based on information read from the electronic storage device by the antenna. A connector of a secure reader system having a reader is provided to physically couple to a container having an information storing mechanism, for periodically reading information from an information storing mechanism. The connector may draw material from the container simultaneous with the reading.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.12/707,449 filed on Feb. 17, 2010 (now U.S. Pat. No. 8,150,549 issued onApr. 3, 2012), which is a continuation of U.S. patent application Ser.No. 10/742,125 filed on Dec. 19, 2003 and subsequently issued as U.S.Pat. No. 7,702,418 on Apr. 20, 2010, which is a continuation-in-part ofU.S. patent application Ser. No. 09/880,472 filed on Jun. 13, 2001 andsubsequently issued as U.S. Pat. No. 6,879,876 on Apr. 12, 2005. U.S.patent application Ser. No. 12/707,449 2010 (now U.S. Pat. No.8,150,549) is also a continuation of U.S. patent application Ser. No.10/139,104 filed on May 3, 2002, and subsequently issued at U.S. Pat.No. 7,747,344 on Jun. 29, 2010, which is a continuation-in-part of U.S.patent application Ser. No. 09/880,472 filed on Jun. 13, 2001 andsubsequently issued as U.S. Pat. No. 6,879,876 on Apr. 12, 2005. Thedisclosures of all of the foregoing applications, publications, andpatent are hereby incorporated by reference herein in their respectiveentireties, for all purposes, and the priority of all such applicationsis hereby claimed under the provisions of 35 U.S.C. §120.

FIELD OF THE INVENTION

This invention relates to a storage and dispensing system for thestorage and dispensing of liquids. In particular, the invention relatesto using a radio frequency identification tag and a radio frequencyantenna to assure proper association of a particular liquid to aparticular process. Embodiments described relate to reader or trackingsystems. In particular, embodiments relate to reader systems employingfeatures to ensure secure and proper readings. Embodiments may alsorelate to features that account for changes in characteristics from oneitem being read or tracked to another.

BACKGROUND OF THE INVENTION

Certain manufacturing processes require the use of liquid chemicals suchas acids, solvents, bases, photoresists, CMP slurries, dopants,inorganic, organic and biological solutions, pharmaceuticals, andradioactive chemicals. Often, these processes require a specific liquidchemical for each particular process. Furthermore, each process mayrequire a specific liquid chemical at various stages of the process.Storage and dispensing systems in many instances are arranged to allowalternative containers to be used to deliver liquid chemicals to amanufacturing process at a specified time. Consequently, manufacturingpersonnel need to change the liquid chemical being used for theparticular process at the specified time so that the system delivers thecorrect liquid chemical to the manufacturing process. It is criticalthat the proper liquid chemical be installed into the systems for theparticular process. If the incorrect liquid chemical is installed for aparticular process, personnel may be put at risk. Furthermore, equipmentand the articles under manufacture may be severely damaged or evenrendered useless for their intended functions.

Prior art systems have attempted to utilize unique pump connectors thatwill only fit with a correct container. Each container has a uniqueconfiguration based on the liquid chemical contained therein. Theintention is that only the correct chemical can be used in anyparticular manufacturing process, because the process will dictate aunique pump connection and a corresponding container with the correctchemical liquid. One example of such a system is disclosed in Osgar etal., “Liquid Chemical Dispensing System With Sensor,” U.S. Pat. No.5,875,921. The Osgar system uses physical configurations, called keycodes, to prevent accidental dispensing of an improper liquid from acontainer. Both the container and a connector have unique key codeconfigurations. The connector must have the same key code configurationas the container for the connector to be properly coupled with thecontainer. The Osgar system also employs a sensor that senses propercoupling of the connector to the container. When the sensor senses aproper coupling of the connector to the container, a pump is enabled.When the container and the connector are not properly coupled, the pumpis disabled.

Some prior art systems, however, do allow the pump connectors to bepartially connected to the incorrect chemicals such that pumping cantake place even though the connection is not proper. In addition,personnel still can attach the wrong chemical to the wrong process or atthe wrong time. Such incorrect connections can be dangerous to personneland have caused millions of dollars of damage to equipment and toarticles of manufacture. A system that provides a reliable connectionbetween the correct chemical and the correct process, and enablestracking of incorrect connection attempts by personnel would be a usefulimprovement over the prior systems.

In the fabrication of semiconductor devices, materials of varyingpurposes are deposited on a semiconductor substrate. The semiconductorsubstrate is often a wafer of monocrystalline silicon materials such assilicon dioxide. Materials deposited thereon may include copper,aluminum and other metals to form metal lines or other circuit featureswithin trenches of the semiconductor substrate. Additional circuitfeatures and material layers may be formed on the semiconductorsubstrate throughout the fabrication process.

In order to form trenches as described above, a photoresist material isfirst deposited above the semiconductor substrate. The manner oftransport and delivery of the photoresist material to the semiconductorsubstrate may be critical to the fabrication process. For example, thecost of application of the wrong type of photoresist may be quiteextreme. Such an error may cost in terms of a destroyed expensivesemiconductor substrate, such as a circuit device wafer, wastedphotoresist, and the downtime necessary to correct the error.

The photoresist material described above is transported and delivered tothe surface of the semiconductor substrate in a liquid form. Thephotoresist material is applied and thinly spread across thesemiconductor substrate surface generally by a spin-on process.Parameters of the spin-on process are selected to ensure a fairlyuniform, thin distribution of the photoresist across the surface of thesemiconductor substrate. This is often followed by application of heatto the semiconductor substrate resulting in the formation of a solidphotoresist layer on the semiconductor substrate.

The solid photoresist layer described above may be patterned to allowfor the formation of trenches therebelow by conventional etchingtechniques. However, proper trench formation and uniformity is dependentin part upon the degree of uniformity displayed by the thin photoresistlayer defining the trenches. Indeed, proper transport and delivery ofphotoresist material to the semiconductor substrate is critical to thefabrication of a reliable semiconductor device. In fact, as devicefeatures, such as metal lines, become smaller and smaller, the adverseeffect of photoresist non-uniformity on a device feature becomesmagnified.

Achieving a uniformly thin photoresist layer may require application ofa spin-on, or other process, which employs parameters based on theparticular physical and functional characteristics of the photoresistmaterial. Unfortunately, characteristics of a photoresist material typemay vary from one batch to the next. For example, the viscosity of aphotoresist type may vary from one batch or container to the next. Thus,establishing reliable predetermined parameters for forming an adequatelyuniform photoresist layer on a semiconductor substrate may be extremelydifficult, if not impossible, to accomplish. Proper transport andapplication of photoresist material to the semiconductor substrate faceschallenges related to both providing the proper type of photoresistmaterial, and employment of the proper application parameters in lightof precise characteristics of the photoresist material provided.

SUMMARY OF THE INVENTION

In various embodiments, the present invention provides systems forhandling liquid and methods for the same. Systems according to thepresent invention substantially eliminates or reduces disadvantages andproblems associated with previously developed storage and dispensingsystems by using a radio frequency identification tag and a radiofrequency antenna to assure proper association of a particular liquid toa particular process. The system in one embodiment includes a containercapable of holding a liquid. A storage means is coupled with thecontainer for electronically storing information relating to the liquidstored in the container. The system also includes a communication means,for storing information to and reading information from the storagemeans. The system includes a controller means, coupled with thecommunication means, for controlling processing of the liquid based oninformation read from the storage means by the communication means.

In one embodiment, a cap is also coupled with the opening such that theliquid is sealed in the container. A radio frequency identification(RFID) tag is mounted on the cap which is capable of electronicallystoring information. The RFID tag comprises a passive RF transponder andan electrically erasable programmable read-only memory (EEPROM). Aconnector is coupled with the cap such that the liquid can be dispensedfrom the container through the connector. A radio frequency (RF) antennais mounted on the connector which stores information to and readsinformation from the EEPROM on the RFID tag. A microprocessor-basedcontroller is coupled with the RF antenna such that the controllercontrols processing the liquid from the container based on informationread from the RFID tag by the RF antenna.

In one embodiment, the connector further comprises a connector head anda probe extending from the connector head. The probe is insertablethrough a center of the cap and into the opening. The probe has a flowpassage. A pump is coupled with the probe and with the flow passage forpumping liquid through the probe and the flow passage.

Other embodiments, aspects and features of the invention will be morefully apparent from the ensuing disclosure and appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a system for storing, dispensing and processing liquids inaccordance with the present invention.

FIG. 2 shows a filling system for filling a container with liquid.

FIG. 3 shows a preferred embodiment of a processing system fordispensing and processing liquid.

FIG. 4 shows a user-interface in the processing system for dispensingand processing liquid shown in FIG. 3.

FIG. 5 is a sectional perspective view of an embodiment of a readersystem.

FIG. 6 is an exploded perspective view of an embodiment of a containerassembly of the reader system of FIG. 5.

FIG. 7 is a cross-sectional view of the container assembly of FIG. 6.

FIG. 8 is a magnified view of an antenna of the container assembly takenfrom section line 4-4 of FIG. 7.

FIG. 9 is a perspective view of an embodiment of a cabinet drawer of thereader system of FIG. 5 and including a plurality of containerassemblies.

FIG. 10 is a sectional view of the process assembly of FIG. 5 revealinga spin-on tool.

FIG. 11 is a flowchart summarizing methods of employing a reader systemsuch as that of FIG. 5.

FIG. 12 is a flowchart summarizing additional methods of employing areader system such as that of FIG. 5.

DETAILED DESCRIPTION OF THE INVENTION, AND PREFERRED EMBODIMENTS THEREOF

FIG. 1 shows system 10 for storing, dispensing and processing liquids inaccordance with the present invention. System 10 includes filling system12 and processing system 14.

Filling system 12 includes a plurality of liquids 16 and containers 18.In operation of filling system 12, liquids 16 are dispensed intocontainers 18. Liquids 16 are typically liquid chemicals includingacids; solvents; bases; photoresists; dopants; inorganic, organic, andbiological solutions; pharmaceuticals; and radioactive chemicals.Filling system 12 tracks which of liquids 16 is placed into whichcontainers 18 so that liquids 16 in containers 18 can be identifiedlater, as will be discussed more fully below. After filling ofcontainers 18 has been completed, containers 18 are transported toprocessing system 14.

Processing system 14 includes a plurality of containers 18 and processes20. In operation of processing system 14, liquids 16 contained incontainers 18 are used in processes 20. For example, containers 18 maycontain a liquid chemical such as photoresist for use in themanufacturing of integrated circuits. Processing system 14 readscontainers 18 to determine which liquids 16 are contained within them sothat the proper liquid 16 is used in the proper process 20, as will bediscussed more fully below.

FIG. 2 shows filling system 12 for filling a container with liquid.Filling system 12 includes microprocessor-based control unit 32,electrically erasable programmable read-only memory (EEPROM) writer 34,liquid reservoir 36, cap 38, and container 18 a. Control unit 32 iselectrically connected to EEPROM writer 34 and liquid reservoir 36.Liquid reservoir 36 is connected to container 18 a. Cap 38 includesradio frequency identification (RFID) tag 42. RFID tag 42 includes anEEPROM and a passive radio frequency transponder. EEPROM writer 34 iscapable of writing to RFID tag 42 on cap 38.

In operation of filling system 12, control unit 32 regulates dispensingof liquid from liquid reservoir 36 into container 18 a. Typically,filling system 12 includes a plurality of liquid reservoirs 36 connectedto control unit 32. That is, control unit 32 typically regulatesdispensing of a plurality of liquids into a plurality of containers 18.For ease of illustration, a single liquid reservoir 36 and a singlecontainer 18 a are shown. To begin operation of filling system 12,control unit 32 sends a signal to liquid reservoir 36 instructing liquidreservoir 36 to begin dispensing liquid into container 18 a. Liquidreservoir 36 continues dispensing liquid into container 18 a untilcontainer 18 a is filled to an appropriate level. After container 18 ais filled, liquid reservoir 36 sends a signal to control unit 32indicating container 18 a is full. Control unit 32 then sends a signalto liquid reservoir 36 to stop dispensing liquid into container 18 a.

After container 18 a is filled, control unit 32 sends a signal to EEPROMwriter 34. This signal contains information about liquid contained inliquid reservoir 36. EEPROM writer 34 subsequently programs the EEPROMcontained in RFID tag 42 with information received from control unit 32in a process known to the art. Information programmed to the RFID tag 42includes, for example, the type of liquid dispensed into container 18 afrom liquid reservoir 36, the producer of the liquid contained in liquidreservoir 36, the date of filling of container 18 a with liquid fromliquid reservoir 36, the date of expiration of the liquid contained incontainer 18 a, and similar useful information. Once container 18 a hasbeen filled and RFID tag 42 has been programmed by EEPROM writer 34, cap38 is secured onto container opening 44 of container 18 a. In apreferred embodiment, cap 38 is threadably connected to containeropening 44 of container 18. Cap 38 may also be secured onto containeropening 44 by, for example, snapping cap 38 onto container opening 44 orvacuum sealing cap 38 onto container opening 44. The method of securingcap 38 onto container opening 44 depends on the properties of the liquidcontained in container 18 a. After cap 38 has been secured ontocontainer 18 a, container 18 a is transported to a processing system.

FIG. 3 shows a preferred embodiment of processing system 14. Processingsystem 14 includes cap 38, container 18 a, connector 50, control unit52, and pump 54. Container 18 a includes container opening 44. Cap 38includes RFID tag 42, rupturable membrane 56, and membrane scores 58.Connector 50 includes radio frequency (RF) antenna 60, port adaptor 62,modular antenna line 64, adaptor tube 66, and probe 68. Probe 68includes lower probe port 70 located adjacent probe tip 72. In apreferred embodiment, cap 38 is threadably connected to containeropening 44 of container 18 a. After container 18 a with cap 38 aretransported to the desired location, probe hole 74 and vent hole 76 areexposed. Rupturable membrane 56 is exposed through probe hole 74.Rupturable membrane 56 has membrane scores 58 in its surface. Connector50 is configured to be interconnected with cap 38.

FIG. 3 shows how the components of processing system 14 are assembled.More specifically, connector 50 is shown being interconnected with cap38 and container 18 a. Probe tip 72 is inserted through probe hole 74and pressed against rupturable membrane 56 proximate to membrane scores58. When sufficient pressure is applied on connector 50 towardrupturable membrane 56, probe tip 72 ruptures rupturable membrane 56along membrane scores 58 allowing probe 68 to be inserted throughmembrane 56. Continued pressure on connector 50 then allows connector 50to be moved immediately adjacent cap 38. Probe 68 is then incommunication with the interior of container 18 a. As such, connector 50is mounted on container 18 a. Adapter tube 66 and port adapter 62provide a liquid passage from the interior of container 18 a to pump 54.When processing system 14 is properly assembled, pump 54 is capable ofpumping the liquid in container 18 a through port adapter 62 and adaptertube 66 to a manufacturing process, such as the manufacturing ofintegrated circuits. Typically, processing system 14 includes aplurality of containers 18, a plurality of connectors 50, and aplurality of pumps 54 connected to control unit 52. That is, controlunit 52 typically regulates dispensing of liquid from a plurality ofcontainers 18 to a plurality of processes via a plurality of pumps 54.For ease of illustration, a single connector 50, a single container 18a, and a single pump 54 are shown.

The operation of pump 54 is controlled by control unit 52. Control unit52 may receive input from an operator relating to starting and stoppingpump 54. For example, an operator seeking to start pumping the liquidchemical in container 18 a to a manufacturing process may input thisinformation to control unit 52.

Control unit 52, however, is also configured to receive signals from RFantenna 60 via either modular antenna line 64 or RF transmissions. Inoperation of processing system 14, control unit 52 receives input from aprocess indicating a liquid needed by the process. For example, in themanufacture of integrated circuits, a layer of photoresist may beneeded. Control unit 52 sends a signal to RF antenna 60. Probe 68 ofconnector 50 is then inserted through probe hole 74 until connector 50is immediately adjacent to cap 38. Connector 50 is positioned such thatRF antenna 60 is located adjacent RFID tag 42. A signal requesting theinformation stored in the EEPROM of RFID tag 42 is then transmitted fromRF antenna 60 to RFID tag 42. The signal is received by the passive RFtransponder contained in RFID tag 42. The signal received by thetransponder activates RFID tag 42. Subsequently, information stored onthe EEPROM contained in RFID tag 42 is read from the EEPROM to thetransponder. The transponder then transmits the information contained onthe EEPROM to RF antenna 60. RF antenna 60 sends the informationreceived from RFID tag 42 to control unit 52 via modular antenna line 64or via a RF transmission. Control unit 52 compares information receivedfrom RF antenna 60 to information about the liquid needed by theprocess, and controls pump 54 accordingly. That is, if container 18 acontains an undesired or unexpected liquid, control unit 52 will disablepump 54. Conversely, if container 18 contains an expected and desiredliquid, control unit 52 will enable pump 54.

Consequently, when processing system 14 is not properly assembled and anoperator, believing that processing system 14 is properly assembled,inputs information to start pump 54, pump 54 will not operate. In thisway, processing system 14 prevents the accidental operation of animproperly assembled system. This will prevent delivery of an improperliquid to a process.

FIG. 4 shows a preferred embodiment of user-interface 80 in processingsystem 14 for dispensing and processing liquid shown in FIG. 3. Userinterface 80 includes touch screen 82, microprocessor-based control unit52, bus control unit 84, communication bus 86, read/write devices 88,connector 50, cap 38, and container 18 a. Touch screen 82 is connectedto control unit 52. Control unit 52 is connected to bus control unit 84,typically via an Ethernet or other serial communications cable. Controlunit 52 also receives input from a process. Bus control unit 84 isconnected to read/write device 88 via communication bus 86. Read/writedevice 88 is connected to connector 50 via modular antenna line 90.Read/write device 88 may also communicate with connector 50 throughremote antenna 92. Connector 50 communicates with RFID tag 42 on cap 38via RF antenna 60 using radio frequency transmissions.

For simplicity of illustration, FIG. 4 shows a single connector 50connected to communication bus 86 through read/write device 88. In atypical system, a plurality of read/write devices 88 are connected tocommunication bus 86, each read/write device 88 connected to differentconnectors 50 coupled with containers 18 containing different liquids.Containers 18 are typically situated in a plurality of drawers, eachdrawer containing a plurality of positions. Each position is configuredto hold one container 18. In operation of user-interface 80, each ofcontainers 18 is graphically displayed on touch screen 82 in itscorresponding drawer and position within the drawer. For example, in asystem having two drawers and four positions within each drawer,container 18 a positioned in the second position of the first drawer isgraphically displayed on touch screen 82 in the second position of thefirst drawer. When connector 50 is matched properly with container 18 a(as described above), the graphic representation of container 18 a ontouch screen 82 is displayed in a first color, typically green. Thisindicates to an operator that the liquid contained in container 18 a isready for dispensing to a process. Conversely, if connector 50 ismatched improperly with container 18 a (as described above), the graphicrepresentation of container 18 a on touch screen 82 is displayed in asecond color, typically red, and a warning message appears on touchscreen 82. This indicates to the operator that the liquid contained incontainer 18 a will not dispense to a process until the mismatch iscorrected.

When container 18 a needs to be replaced (for example, when container 18is empty), the operator removes container 18 a from its position. Touchscreen 82 then graphically displays container 18 a, along with thedrawer number and position number of container 18 a. The operator thenexchanges container 18 a for new container 18 b, and couples connector50 with new container 18 b. If connector 50 is matched properly with newcontainer 18 b (as described above), all containers 18 are displayed ontouch screen 82 in the first color. If connector 50 is matchedimproperly with new container 18 b (as described above), new container18 b is displayed on touch screen 82 in the second color and a warningmessage appears on touch screen 82.

Touch screen 82 also allows the operator to choose from a variety ofoperations using RFID tag 42. Each operation is selectable from a buttonon touch screen 82 which corresponds to each operation. For example, anoperator may view information stored on RFID tag 42 about liquidcontained in containers 18, record information to RFID tag 42 aboutliquid in containers 18 (such as when the liquid is installed into itsproper drawer and position, the shelf life of the liquid, what processthe liquid is used in, when the liquid is used in a process, how much ofthe liquid is used in a process, etc.), or enable probe 68 fordispensing liquid from containers 18. The operator touches the button ontouch screen 82 corresponding to a desired operation. Touch screen 82sends the selection made by the operator to control unit 52. Controlunit 52 subsequently commands bus control unit 84 to perform theselected operation. The selected operation is performed, and the resultis displayed on touch screen 82.

As an example, the operator may desire to view information stored onRFID tag 42 about liquid in container 18 a. The operator first pushesthe button on touch screen 82 corresponding to this operation. Touchscreen 82 sends this selection to control unit 52. Control unit 52 thencommands bus control unit 84 to access RFID tag 42 on container 18 a. Toaccess RFID tag 42, bus control unit 84 sends a signal alongcommunication bus 86 to the read/write device accessing RFID tag 42:read/write device 88. Read/write device 88 then accesses RF antenna 60,either via modular antenna line 90 or a RF transmission via antenna 92.In this preferred embodiment, separation 94 between antenna 92 and RFantenna 60 is typically less than five meters for successful RFcommunication. Next, RF antenna 60 transmits a signal to RFID tag 42. Inthis preferred embodiment, separation 96 between RF antenna 60 and RFIDtag 42 is typically less than ten millimeters for successful RFcommunication. The signal is received by the passive RF transpondercontained in RFID tag 42. The signal activates RFID tag 42 and therequested information is accessed from the EEPROM contained on RFID tag42. The requested information is then read from the EEPROM by thetransponder, and the transponder transmits the information back to RFantenna 60. RF antenna 60 then sends the information to read/writedevice 88 either via modular antenna line 90 or via RF transmissions toantenna 92. The information is sent along communication bus 86 to buscontrol unit 84, which in turn sends the information to control unit 52.Once received by control unit 52, information about the liquid incontainer 18 a is displayed on touch screen 82.

The liquid dispensing system of the present invention prevents theaccidental operation of an improperly assembled system by storing liquidin a container having a cap with a radio frequency identification tagcontaining electrically erasable programmable read-only memory.(EEPROM). The EEPROM stores information about the liquid contained inthe container. In a processing system, the information contained on theEEPROM can be accessed to prevent the accidental dispensing of animproper liquid and to maintain a database of the liquids used in aprocess. Also, additional information about the liquid can be written tothe EEPROM in the processing system, such as when the liquid is used ina process and how much of the liquid is used in a process. Furthermore,the present invention allows for a standardization of the cap,container, and connector, since the control system now responds toinformation read from the cap rather than upon sensing a physicalconnection. This allows for a reduction in the amount of hardware thatwas necessary to accommodate the physical connectability safety featureof prior art systems.

Although the present invention has been described with reference topreferred embodiments, workers skilled in the art will recognize thatchanges may be made in form and detail without departing from the spiritand scope of the invention. For example, other forms of electronicstorage may be used on RFID tag 42, such as erasable programmableread-only memory (EPROM), programmable read-only memory (PROM), andrandom-access memory (RAM). Also, the components of processing system 14which communicate using radio frequencies may be configured tocommunicate using other areas of the electromagnetic spectrum, such asthose in the areas of cellular or infrared communications.

Additional features and functions can be incorporated into the presentinvention, expanding the system capabilities of the present invention.These features and functions include, but are not limited, to InventoryManagement. Such an inventory management module may be internal to theuse of the present invention in an enterprise-wide network or may beintegrated into existing Inventory Management software systems that arein place in individual processing facilities. Such a module could beutilized anywhere from the receiving dock to the empty containerdisposal center. Inventory management is implementable in a manner thatallow users to track material usage, update inventory records, andprovide a means of communicating (either automatically or by prompt)when a material needs to be re-ordered via the Internet or othercommunication tool.

Additionally, these features and functions may include the integrationof container sensing input signals that would be processed to sendcontrol signal outputs to the tool. The inputs may come from the probeitself or from an external sensing system. Such sensing may includelevel sensing, temperature sensing or direct sensing of other materialproperties of the product in the container. This data may becumulatively compiled to create a history of a container and itscontents.

These features and functions may also include the communication ofchemical data from the RFID tag directly to the tool itself, therebyproviding another level of security and avoiding operator error.Information communicated by the RFID tag could be used to control trackfunctions such as film thickness, spin speed, etc.

Features and advantages of the invention are more fully shown withrespect to the following example, which is not to be limitinglyconstrued, as regards to the character and scope of the presentinvention, but is intended merely to illustrate a specific preferredaspect useful in the broad practice of the present invention.

Example 1

From the same lot of Oxide Slurry OS-70KL material (ATMI MaterialsLifecycle Solutions, Danbury, Conn.) several different sample vials weremade up, containing the OS-70KL material, to simulate behavior of theliquid in a bag in a drum container of the type generally shown anddescribed herein and in U.S. Pat. Nos. 7,188,644 and 6,698,619incorporated by reference herein in their entireties, with varyingheadspace in the interior volume of the liner.

The sample vials were made up with the following differing headspacelevels: 0%, 2%, 5% and 10%. Each of the sample vials was vigorouslyshaken for one minute by hand, and the liquid in the vial was thensubjected to analysis in an Accusizer 780 Single Particle Optical Sizer,a size range particle counter commercially available from Sci-Tec Inc.(Santa Barbara, Calif.), which obtains particle counts in particle sizeranges that can then be “binned” algorithmically into broad particledistributions.

The data obtained in this experiment are shown in Table 1 below. Theparticle counts are shown for each of the particle sizes 0.57 μm, 0.98μm, 1.98 μm and 9.99 μm, at the various headspace percentage values of0%, 2%, 5% and 10% headspace volume (expressed as a percentage of thetotal interior volume occupied by the air volume above the liquidconstituting the headspace void volume).

TABLE 1 Size Range Particle Counts for Varying Headspace Volumes inSample Vials Average Initial Particle Particle Particle ParticleParticle Particle Size Count Count - Count - Count - Count - for Before0% 2% 5% 10% Range Shaking Headspace Headspace Headspace Headspace SizeRange Particle Counts Immediately After Shaking Vial for One Minute 0.57μm 170,617 609,991 134,582 144,703 159,082 0.98 μm 13,726 14,836 22,09620,294 26,429 1.98 μm 2,704 2,900 5,298 4,397 6,293 9.98 μm 296 321 469453 529 Size Range Particle Counts 24 Hours After Shaking Vial for OneMinute 0.57 μm 110,771 1,198,296 191,188 186,847 182,217 0.98 μm 11,72018,137 21,349 20,296 24,472 1.98 μm 2,701 2,383 4,658 4,272 5,704 9.98μm 138 273 544 736 571

The particle size analyzer presented the data in terms of large-sizeparticle counts, in units of particles per milliliter>a specificparticle size in micrometers (μm). The particle count data has beendetermined to provide a direct correlation between the magnitude of theparticle count and wafer defectivity when the reagent containing suchparticle concentration is employed for manufacturing microelectronicdevices on semiconductor wafers.

The data taken immediately after the shaking experiment show sometrending toward larger particle counts with increasing headspace values,particularly for particles>0.98 μm. Data taken 24 hours later show thesame trending toward higher particle distributions.

The data show that increasing headspace in the vial produced increasingaggregations of large size particles, which are deleterious insemiconductor manufacturing applications and can ruin integratedcircuitry or render devices formed on the wafer grossly deficient fortheir intended purpose.

As applied to bag in a drum containers of the type shown and describedherein and in U.S. Pat. Nos. 7,188,644 and 6,698,619 (which areincorporated by reference herein in their respective entireties), theresults of this Example indicate the value of the preferred zeroheadspace arrangement. Any significant headspace in the containerholding high purity liquid, combined with movement of the containerincident to its transport, producing corresponding movement, e.g.,sloshing, of the contained liquid, will produce undesirable particleconcentrations. Therefore, to minimize the formation of particles in thecontained liquid, the headspace should be correspondingly minimized toas close to a zero headspace condition as possible.

Embodiments are described below with reference to certain features of asecure reader system. In particular, features are described which helpto ensure the reliability and security of a container assemblycontaining a photoresist material. Additionally, features are describedwhich allow for seamless calibration of application parameters to ensurethat any change in characteristics of a photoresist material type areaccounted for when changing from one batch or container of photoresistmaterial to the next.

Referring now to FIG. 5, an embodiment of a secure reader system (SRS)100 is shown. The SRS 100 includes a material cabinet 101 for housing acontainer assembly 110. In the embodiment shown, only one containerassembly 110 is visible. However, a plurality of container assemblies110 may be included. Additionally, the material cabinet 101 may havemultiple material drawers 130 as shown, to increase the number and typesof container assemblies 110 which may be accommodated.

The container assembly 110 includes an information storing mechanism forstoring information about a material contained therein, such as aninformation tag 200 (see FIG. 6). As shown in FIG. 5, a cap 115 isprovided coupled to a container body 120. The information tag 200 isspecifically located at the cap 115 in the embodiment shown. The cap 115is configured to receive and secure a connector 118. The connector 118in turn, is configured for simultaneously coupling the containerassembly 110 to a process assembly 103 and a control unit 102 asdescribed further below.

The container assembly 110 is configured to accommodate a material thatis to be delivered to the process assembly 103. In the embodiment shown,the connector 118 is coupled to a process assembly 103 by way of amaterial line 125. Similarly, the connector 118 is coupled to thecontrol unit 102. The control unit 102 is configured to identify andmonitor the container assembly 110 as described further herein. Aninformation cable 122 is provided for communication between thecontainer assembly 110 and the control unit 102.

In the embodiment shown in FIG. 5, the control unit 102 includes acontroller 150 directly coupled to the container assembly 110 and atouch screen monitor 140. The touch screen monitor 140 may displayinformation directly related to the container assembly 110, or materialtherein, as described further herein. In addition to identifying andmonitoring the container assembly 110, the control unit 102 may directapplications at the process assembly 103 which employ material containedby the container assembly 110.

Central processing capability is contained within the controller 150 anda controller cable 155 is provided to couple the process assembly 103thereto. In this manner, applications employing material from acontainer assembly 110 may be directed by the control unit 102. Forexample, a user may direct such an application via the touch screenmonitor 140. In certain embodiments, directing of such an application isbased on information obtained from the information storing mechanismdescribed above, and with reference to FIG. 6 below (see the informationtag 200).

Continuing with reference to FIG. 5, the process assembly 103 includes aprocess chamber 175 coupled to a microprocessor 160. The microprocessor160 may direct an application within the process chamber 175 based on apredetermined set of instructions or information from the controller150. The process chamber 175 may contain a tool or equipment to employmaterial contained in the container assembly 110. For example, in oneembodiment, the process chamber 175 includes a spin on tool 600 forapplication of a photoresist material 300 from the container assembly110 to a semiconductor substrate 675 (see FIG. 10).

Referring now to FIG. 6, the container assembly 110 is shown in furtherdetail. As described above, a connector 118 is coupled to the containerassembly 110 at the cap 115. The cap 115 may include a rupturablemembrane 210 to initially seal the contents of the container assembly110. In such an embodiment, a probe 215 of the connector 118 may be usedto penetrate the rupturable membrane 210 and provide communicationbetween the material of the container assembly 110 and the connector118. As described above, the connector 118 also includes an informationcable 122 and a material line 125. The material line 125 couples to theprobe 215 within the body of the connector 118. The information cable122 terminates at an antenna assembly 275 described further below.

With additional reference to FIGS. 11 and 12, embodiments of employingan SRS 100 as shown in FIG. 5 are summarized in the form of flow-charts.FIGS. 11 and 12 are referenced throughout portions of the description tofollow as an aid in describing how features of the SRS 100 may interactduring use.

As also described above, the cap 115 of the container assembly 110 alsoincludes an information tag 200 as the information storing mechanism.The information tag 200 is configured to hold data regarding thematerial contained by the container assembly 110. For example, in oneembodiment, data regarding the material's properties, date andconditions of manufacture, amount, and other characteristics are storedat the information tag 200 (see 710 of FIG. 7).

The information tag 200 may be a bar code, magnetic strip, radiofrequency identification (RFID) device employing electronically erasableprogrammable read only memory (EEPROM), or any other conventionalmechanism suitable for storing information regarding material containedwithin the container assembly 110. In one embodiment, the informationtag 200 includes EEPROM to increase the amount of data which may bestored at the information tag 200. In this embodiment, the data may beupdated as indicated at 820 of FIG. 12, by writing to the informationtag 200 as the material within the container assembly 110 changes (e.g.as the material amount decreases due to use in an application).

Continuing with reference to FIGS. 6 and 7, the container assembly 110may contain a photoresist material 300 for use in a particularapplication. The connector 118 includes features to ensure that theproper photoresist material 300 and container assembly 110 with properphotoresist material 300 is coupled to the connector 118 for use in theapplication.

The information cable 122 terminates at an antenna assembly 275 asnoted. The connector 118 may be physically coupled to the cap 115, withthe probe 215 in the container body 120 and antenna assembly 275adjacent the information tag 200. Once positioned in this manner, theantenna assembly 275 may read information from the information tag 200at the cap 115. In one embodiment, the antenna assembly 275 is preventedfrom reading information until the type of coupling described here,between the connector 118 and the cap 115, is employed. Information readby the antenna assembly 275 may be associated exclusively with thecontainer assembly 110 due to the manner in which the connector 118 isphysically secured and positioned at the container assembly 110. Thus,the connector 118 acts as a single pathway through which both material,in the container assembly 110, and information from the information tag200, may pass.

To further ensure that the proper material and container assembly 110are coupled to the connector 118 for a desired application, averification tool 250 may be employed prior to coupling the connector118 to the cap 115 of the container assembly 110. The verification tool250 includes a verification cable 255 coupled to the controller 150 (seeFIG. 5). The verification cable 255 terminates at a verification antenna265 for reading information from the information tag 200. Theverification antenna 265 includes a verification indicator 260, such asvisible light emitting diodes (LEDs) or other suitable mechanisms.

With additional reference to FIG. 11, an application is selected at thecontrol unit 102 (see FIG. 5). As indicated at 730, the verificationantenna 265 of the verification tool 250 may be placed adjacent theinformation tag 200 and directed by the controller 150 (see FIG. 5) toread information from the information tag 200. The verificationindicator 260 may then provide a visible response to the informationread by the verification antenna 265. For example, in one embodiment,the verification indicator 260 may emit a green light when theinformation read from the information tag 200 indicates that anacceptable material 300 and container assembly 110 are present for agiven application. Alternatively, the verification indicator 260 mayemit a red light when the information from the information tag 200indicates otherwise. In this manner, the photoresist material 300 andcontainer assembly 110 may be verified before coupling of the connector118 to the cap 115 of the container assembly 110.

In the embodiment shown, verification, as described above, preventsrupturing of the rupturable membrane 210 and exposure of the photoresistmaterial 300 in order to verify the container assembly 110 andphotoresist material 300 for use in a desired application. Additionally,the verification indicator 260 may elicit a visible response from theantenna assembly 275 as directed by the controller 150. This may includevisible responses from multiple antenna assemblies 275 simultaneously,such as at a material drawer 130 as shown in FIG. 9.

With reference to FIG. 7, the container assembly 110 is physicallysecured to the SRS 100 of FIG. 5 as indicated at 740 (see FIG. 11). Thisis achieved through the coupling of the connector 118 to the cap 115.The probe 215 extends down into the container body 120 and into contactwith the material. As shown, the connector 118 is properly secured tothe container assembly 110 such that a fluid (e.g. photoresist material300) may be drawn or pumped from the container body 120 through theprobe 215 and into the material line 125 by conventional means.

The connector 118 is simultaneously secured to the cap 115 in a mannerthat also allows information from the information tag 200 to be read bythe antenna assembly 275. The connector 118 is secured in this mannerensuring that it is ready to draw photoresist material 300 from thecontainer assembly 110 at the same time the information may betransferred from the information tag 200 to the antenna assembly 275.This physically eliminates the possibility of the antenna assembly 275reading information from any source other than the information tag 200of the very container assembly 110 that is simultaneously incommunication with the connector 118. For example, this prevents usersfrom obtaining information from the information tag 200 of one usablecontainer assembly 110 and photoresist material 300 only to latermistakenly couple a different unusable container to the connector 118for an application.

Referring to FIG. 7, a container assembly 110 is shown with theconnector 118 assembled thereto. The probe 215 extends into thecontainer body 120 for withdrawal of photoresist material 300 to thematerial line 125 for use in an application. The probe 215 may extendvertically into the container body 120 as shown. Alternatively, theprobe 215 may be configured of differing shapes or lengths to ensurethat photoresist material 300 is drawn from the lowermost portion of thecontainer body 120. When the connector 118 is secured as shown, at thecap 115, the antenna assembly 275 rests adjacent the information tag200. Information may be exchanged between the information tag 200 andthe antenna assembly 275 as described above, and transferred along theinformation cable 122. Thus, physical coupling of the proper containerassembly 110 may be verified as indicated at 750 before an applicationis run as indicated at 810 (see FIGS. 11 and 12).

With reference to FIGS. 7 and 8, the antenna assembly 275 is shownhaving an antenna portion 480 and an antenna indicator 485. The antennaportion 480 may be a conventional antenna to read information from theinformation tag 200. Physical coupling between the antenna portion 480and the information tag 200 is not required. In the embodiment shown, aminimal clearance 490 is provided between the information tag 200 andthe antenna portion 480 when the connector 118 is properly secured tothe cap 115. A lack of physical contact between the information tag 200and the antenna portion 480 helps preserve the integrity of theinformation tag 200 and the antenna portion 480.

The antenna portion 480 may serve to read information from theinformation tag 200. The antenna indicator 485 may include LED featuresconfigured to light up based on the information obtained from theinformation tag 200. For example, in one embodiment, the antennaindicator 485 may emit a green light when the information read from theinformation tag 200 indicates that an acceptable photoresist material300 and container assembly 110 are present for a given application.Alternatively, the antenna indicator 485 may emit a red light when theinformation from the information tag 200 indicates otherwise. This mayprovide further assurance to the user that the proper container assembly110 is being employed before an application is run making use of thephotoresist material 300.

Continuing with reference to FIGS. 5-8, the exchange of informationbetween the information tag 200 and the antenna assembly 275 may bedirected by the controller 150. The controller 150 may also direct theapplication to be employed as described above. Therefore, in oneembodiment, the determination of whether a particular container assembly110 is acceptable for a particular application is based on apredetermined set of criteria stored in the controller 150. When anunacceptable container assembly 110 is coupled to the connector 118, thecontroller 150 may indicate such at the antenna indicator 485 asdescribed above. Additionally, the controller 150 may respond byterminating the application before photoresist material 300 is drawnfrom the container body 120.

In addition to directing the application based on readings obtained fromthe information tag 200, the controller 150 may also direct thatreadings take place on a continuous or ongoing basis as indicated at 830of FIG. 12. Ongoing readings may be used to prevent replacement of anacceptable container assembly 110 between applications withoutdetection. In a preferred embodiment, readings take place in millisecondintervals. However, readings may also take place in alternate intervals.For example, in one embodiment, readings are obtained by the antennaportion 480 in intervals which are less than an estimated duration ofthe application. This ensures multiple readings by the antenna portion480 before change out of the container assembly 110. Thus, even where anacceptable container assembly 110 is coupled to the connector 118 and anapplication immediately run, there is not enough time to subsequentlycouple an unacceptable container to the connector 118 without detection.In a further embodiment, the readings are obtained in intervals whichare less than an estimated container change-out time (i.e. the timenecessary to change out a container assembly 110). This ensures multiplereadings by the antenna portion 480 before change out of the containerassembly 110 even where no application has yet been run. For example, inan embodiment where change out of the container assembly 110 physicallyrequires more than 5 seconds of the users time, readings may be taken inintervals of no more than about 5 seconds.

Continuing with reference to FIGS. 5-8, the antenna assembly 275 may beconfigured to write updated information to the information tag 200 asindicated at 820 of FIG. 12. For example, as noted above, theinformation tag 200 may include radio frequency identification (RFID)capacity. Therefore, information regarding the amount of material 300 inthe container assembly 110 may be stored in the information tag 200. Inone embodiment, as a quantity of material 300 is drawn from thecontainer assembly 110 during an application, information regarding theamount of photoresist material 300 in the container assembly 110 may beupdated. This updating is obtained by the antenna assembly 275 writingnew information to the information tag 200 accounting for the quantityof photoresist material 300 drawn during the application. Therefore, upto date information regarding the amount of photoresist material 300remains with the container assembly 110. Thus, the container assembly110 may be removed from the SRS 100 or used with a different systemwithout losing information regarding the amount of photoresist material300 in the container assembly 110.

Referring to FIGS. 5 and 9, a container assembly 110 is shown in amaterial drawer 130 of the SRS 100. The material drawer 130 holdsseveral such assemblies for use in a variety of possible applications tobe directed by the controller. This user-friendly capacity also providesthe SRS 100 with built in efficiency.

Referring to FIG. 10, the process assembly 103 of FIG. 5 is shown ingreater detail. In the embodiment shown, the process assembly 103includes a process chamber 175 wherein a spin-on tool 600 is provided.The spin-on tool 600 is configured to receive and distribute photoresistmaterial 300 across the surface of a semiconductor substrate 675. Inother embodiments, the process chamber 175 may include tools foralternate techniques of distributing material, such as meniscus coating,stencil printing, or applications unrelated to photoresist distribution.

As shown in FIG. 10, a semiconductor substrate 675 is centrallypositioned atop a rotatable platform 680 of the spin-on tool 600. Therotatable platform 680 is supported by a pipe 685 having a hallowed outportion 688 that terminates adjacent the semiconductor substrate 675. Inthis manner, a vacuum (shown by arrow 688) may be applied through thepipe 685 by conventional means to secure the semiconductor substrate 675as shown.

With reference to FIGS. 5 and 10, a rotatable motor 690 is shown coupledto the pipe 685 for rotating the spin-on tool 600 as a photoresistmaterial 300 is delivered to the surface of the semiconductor substrate675. The photoresist material 300 is delivered from the material line125 and cabinet 101 as directed by the controller 150. The controller150 directs the described application through the microprocessor 160according to functional properties of the photoresist material 300. Suchfunctional property information is obtained from the container assembly110 as described above.

In one embodiment, the photoresist material 300 is an i-linephotoresist, such as a novolak resin and a phenolic compound in apropylene glycol monomethyl ether acetate (PGMEA) solvent. The phenoliccompound may be a diazonaphtha quinone derivative. The controller 150,by way of the microprocessor 160, directs spinning of the spin-on tool600 at between about 4,000 rpm and about 5,000 rpm as the photoresistmaterial 300 is delivered. The semiconductor substrate 675 is thenexposed to a temperature of between about 90° C. and about 100° C. forbetween about 25 seconds and about 35 seconds. A film of photoresistmaterial 300 is thus provided on the semiconductor substrate 675. Theresulting film may have a thickness of between about 1.0 microns andabout 1.4 microns.

In other embodiments, similar but alternative parameters may be employedto provide alternate films of photoresist material 300 having differentthicknesses. For example, in one embodiment a deep ultraviolet (UV)photoresist film may be provided having a thickness of between about 0.6microns and about 1.0 microns. In another embodiment, a 193 nmphotoresist, similar in character to a deep UV photoresist, may beprovided having a thickness of between about 0.6 microns and about 0.8microns.

The above described applications proceed based in part on informationstored at the container assembly 110. However, in certain situations theinformation may not be entirely accurate. In the embodiments describedhere this may lead to the film thickness deviating from a desired rangeor other distribution problems. For example, there may be a change inviscosity from one batch or container of photoresist to the next that isunaccounted for at the time information is originally stored at thecontainer assembly 110. As shown in FIG. 12, the presence of inaccurateinformation may be identified 840 by conventional means and theapplication revised to employ updated parameters 850. That is,parameters of the application may be changed by entering updatedinformation through the control unit 102. In the embodiment shown, thisrequires only indicating the undesired film thickness obtained at thetouch screen 140. Algorithmic adjustments accounting for the disparitymay be made by the controller 150 and immediately applied toapplications employing the photoresist material 300. The SRS 100 isconfigured in a manner that allows such seamless calibrations. Thisresults in minimal down time and improved throughput when running suchapplications.

In yet another embodiment, information obtained from an informationstoring mechanism may be used dynamically. For example, in situationswhere material properties, such as viscosity, change over time,information stored at the information storing mechanism may relate tothe age of the material or its viscosity at a given point in time. Whenrunning an application such information may be accounted for in anautomated manner. For example, where the controller 150 has knownviscosity rate change information stored therein (see FIG. 5),algorithmic values may be established automatically in a manner thataccounts for the viscosity of the material at the precise time of theapplication.

Embodiments described above provide a secure manner of ensuring that aparticular given material is exclusively made available for a givenapplication. Embodiments are also described which provide auser-friendly and seamless manner of verifying and, if necessary,updating application parameters for which the material is to beemployed.

While the above embodiments are described with reference to particularsemiconductor photoresist applications other embodiments and featuresmay be employed. For example, embodiments may be directed at spin ondielectric applications. Additionally, a system such as that describedabove may be configured for applications employing gas containers, bloodbags, biopharmaceutical containers, drug delivery devices, andcontainers containing one of a variety of material types includingreturnable and reusable containers. A reusable container may even employan information mechanism having new material information written thereonfor each subsequent use of the container with new material therein.Embodiments described may be of particular benefit where materialcharacteristics are prone to vary for example, from one container orbatch to the next. Additionally, various other features and methods maybe employed which are within the scope of the described embodiments.

While the invention has been has been described herein in reference tospecific aspects, features and illustrative embodiments of theinvention, it will be appreciated that the utility of the invention isnot thus limited, but rather extends to and encompasses numerous othervariations, modifications and alternative embodiments, as will suggestthemselves to those of ordinary skill in the field of the presentinvention, based on the disclosure herein. Correspondingly, theinvention as hereinafter claimed is intended to be broadly construed andinterpreted, as including all such variations, modifications andalternative embodiments, within its spirit and scope.

What is claimed is:
 1. A method comprising: electronically readinginformation stored in an electronic information storage deviceassociated with a container adapted to contain a material adapted to betransferred from the container, using a control system comprising anelectronic information reading assembly, where the information includesa material type of the material contained within the container; furtherusing the control system to seek to verify from the information readfrom the electronic information storage device that the material type ofthe material contained within the container is a material acceptable foran application; and one of: upon determining from the information readfrom the electronic information storage device by the electronicinformation reading assembly that the material type of the materialwithin the container is not acceptable for the application, prevent thematerial from being transferred from the container; and upon determiningfrom the information read from the electronic information storage deviceby the electronic information reading assembly that the material type ofthe material within the container is acceptable for the application,enable the transfer of the material from the container, wherein thecontrol system does not require a physical connection of the containerto be sensed.
 2. The method of claim 1, wherein the electronicinformation storage device is associated with a cap of the container. 3.The method of claim 1, wherein preventing the material from beingtransferred from the container includes preventing a membrane sealingthe material within the container from being punctured by operation ofthe electronic information reading assembly providing an outputcontraindicating puncturing of the membrane.
 4. The method of claim 1,wherein enabling the transfer of the material from the containerincludes securing a connector to the container to permit the material tobe one of drawn and pumped from the container.
 5. The method of claim 1,wherein the container is capped and the material comprises liquid sealedin the capped container.
 6. The method of claim 1, wherein theelectronic information storage device includes a radio frequencyidentification (RFID) device.
 7. The method of claim 6, wherein thereading of the information from the RFID device by the electronicinformation reading assembly causes the control system to generate avisual output indicative of the acceptability or non-acceptability ofthe material within the container for the application.
 8. The method ofclaim 1, wherein the information stored in the electronic informationstorage device associated with container further includes one or morematerial properties including at least one of: a viscosity of thematerial; a change in the viscosity of the material over time; aviscosity of the material at a point in time; and an age of thematerial.
 9. A system comprising: a container adapted to store amaterial therein; a connector securable to the container to permittransfer of the material from the container to a process assembly for aparticular application; an electronic information storage deviceassociated with the container, and adapted to store information relatingto the material stored in the container; and a communications deviceadapted to receive said information from the electronic informationstorage element prior to transferring the material stored in thecontainer to the process assembly, wherein said information is used todetermine whether the material in the container is suitable for theparticular application and should be transferred from the container tothe process assembly, wherein the communications device does not requirea physical connection of the container to be sensed.
 10. The system ofclaim 9, wherein the electronic information storage device includes aradio frequency identification (RFID) device.
 11. The system of claim10, wherein the communications device comprises an RFID reading deviceand in response to the information read from the electronic informationstorage element by the RFID reading device generates a visual outputindicative of whether or not the material in the container is suitablefor the particular application and should be transferred from thecontainer to the process assembly.
 12. The system of claim 9, whereinthe information stored in the electronic information storage deviceassociated with the container includes a material type identifying atype of the material stored in the container.
 13. The system of claim12, wherein the information stored in the electronic information storagedevice associated with the container further includes one or morematerial properties including at least one of: a viscosity of thematerial; a change in the viscosity of the material over time; aviscosity of the material at a point in time; and an age of thematerial.